How many pumps will you be using for your vacuum system and explain your answer? Name the pumps used. What type of vacuum system is this? Determine the Mean Free Path (MFP) of the gas molecules in the system.
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Refer to Figure, the vacuum system is designed for vapor deposition in the
chamber.
- How many pumps will you be using for your vacuum system and explain your
answer? Name the pumps used. What type of vacuum system is this? - Determine the Mean Free Path (MFP) of the gas molecules in the system.
- Identify the gas flow regime that is in the vacuum system. Explain your answer.
- The conductance of a pipe will differ in the various flow regimes. Using the
appropriate conductance formula, determine the conductance for each section of the pipelines A, B, C, D, E, and F in liters/sec. - With all the valves opened, calculate the effective pumping speed at the chamber in liters/sec.
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